Agv (automated Guided Vehicle)

AGVs (Automated Guided Vehicles) are mobile robots that transport wafers, materials, or supplies on the fab floor. Applications: FOUP transport (alternative or supplement to OHT), material delivery, sample transport, general logistics. Navigation: Laser guidance, magnetic tape following, natural feature navigation (SLAM). Modern AGVs use LiDAR and cameras. Comparison to OHT: AGVs use floor space, more flexible routing, easier to reconfigure, may be preferred for non-wafer materials. Wafer transport: In fabs without OHT infrastructure, AGVs carry FOUPs between tools. More common in 200mm fabs. Material handling: Deliver masks, chemicals, supplies, consumables to tools. Keep fab floor staff focused on processing. Traffic management: Central controller coordinates multiple AGVs, optimizes routes, prevents collisions. Charging: Battery powered with automated charging stations. Fleet management ensures availability. Cleanroom compatibility: Designed for cleanroom operation - minimal particle generation, special wheels and drives. Safety: Obstacle detection, emergency stops, warning lights. Operate around personnel safely.