Agv Routing

AGV Routing in semiconductor fabs involves optimizing paths for Automated Guided Vehicles that transport wafer lots between process tools.

## What Is AGV Routing?

  • System: AMHS (Automated Material Handling System) component
  • Goal: Minimize transport time while avoiding collisions
  • Methods: Shortest path, traffic-aware, predictive routing
  • Scale: 500+ AGVs in modern 300mm fabs

## Why AGV Routing Optimization Matters

Inefficient routing causes tool starvation, WIP pileups, and cycle time increases. Optimized routing can improve fab throughput 5-15%.

AGV Routing Challenges:┌─────────────────────────────────────┐│ Tool A ═══════╗ Tool B ││ ↑ Corridor ╣ ↓ ││ AGV1 ←── ═══════╝ ──→ AGV2 ││ ↑ ││ Conflict! ││ ││ Tool C ════════════ Tool D │└─────────────────────────────────────┘Routing must prevent deadlocks and minimize wait time

Routing Algorithm Factors:
| Factor | Impact |
|--------|--------|
| Traffic density | Avoid congested corridors |
| Tool WIP levels | Prioritize starving tools |
| Battery status | Route near charging stations |
| Lot priority | Hot lots get faster paths |
| Maintenance | Avoid PM-blocked routes |

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