Fan Out Panel Level Packaging

Fan-Out Panel-Level Packaging (FOPLP) is the advanced semiconductor packaging technology that performs fan-out wafer-level packaging on large rectangular panels (510×515 mm or 600×600 mm) instead of round 300 mm wafers — providing a 3-5× increase in packaging area and corresponding cost reduction per die compared to fan-out wafer-level packaging (FOWLP), making it the most cost-effective approach for high-volume consumer electronics packaging with fine-pitch redistribution layers.

Why Panel-Level

Round wafer (300mm):   Area = π×150² = 70,686 mm²
Panel (510×515mm):     Area = 510×515 = 262,650 mm²  → 3.7× more area!
Panel (600×600mm):     Area = 360,000 mm²            → 5.1× more area!

More area → more dies processed per run → lower cost per die
FormatUsable AreaCost Advantage
300mm wafer FOWLP~65,000 mm²Baseline
510×515 mm panel~250,000 mm²~40-60% lower
600×600 mm panel~340,000 mm²~50-70% lower

FOPLP Process Flow

Step 1: Known Good Die (KGD) preparation
  - Test and sort dies from silicon wafer
  - Place KGD face-down on temporary carrier

Step 2: Reconstitution (Molding)
  - Compression mold epoxy around dies → large rectangular panel
  - Dies are embedded in mold compound at precise positions

Step 3: RDL (Redistribution Layer) formation
  - Dielectric coating (PI or PBO)
  - Lithography for via openings
  - Copper plating for traces
  - Repeat for multiple RDL layers (2-5 layers)

Step 4: Solder ball attachment
  - Ball mount on BGA pads

Step 5: Singulation
  - Saw or laser cut individual packages from panel

FOPLP vs. FOWLP vs. FC-BGA

ParameterFOWLP (wafer)FOPLP (panel)FC-BGA (substrate)
Format300mm round510×515+ mm rect510×515+ mm rect
RDL L/S2/2 µm5/5-8/8 µm8/8-15/15 µm
RDL layers3-62-44-12
Substrate costHighLowHigh
ThroughputMediumHighMedium
Die shift control±2 µm±5-10 µmN/A
ApplicationsMobile SoC, 5GIoT, automotive, consumerCPU, GPU, HPC

Technical Challenges

ChallengeIssueSolution
Die placement accuracy±5-10 µm (worse than wafer)Adaptive lithography, die shift compensation
Panel warpageLarge thin panel warps significantlyPanel materials engineering, process optimization
LithographyNo standard panel litho tools (wafer tools are round)Mask aligner adaptation, direct-write
Equipment availabilityLess mature ecosystem than wafer-levelIndustry investment, standards (SEMI)
YieldDefects scale with areaInspection, repair

Industry Players

CompanyPanel SizeStatus
Samsung (SEMCO)510×515 mmProduction
Daishinku/Nepes600×600 mmR&D/pilot
ASE Group600×600 mmPilot line
JCET515×510 mmR&D
TSMCFocus on FOWLP (wafer)Wafer-level preferred

Applications

  • IoT devices: Low-cost packaging for sensors and MCUs.
  • Automotive: Cost-effective packaging for ADAS and powertrain ICs.
  • 5G mmWave: Antenna-in-package (AiP) on panel format.
  • Consumer electronics: High-volume mobile and wearable packaging.

Fan-out panel-level packaging is the manufacturing paradigm shift from round to rectangular that unlocks dramatic cost reduction for advanced packaging — by leveraging larger processing areas and adapting display-panel manufacturing expertise to semiconductor packaging, FOPLP makes fan-out packaging economically viable for the high-volume consumer and automotive markets that drive the majority of semiconductor unit shipments.

Take fan out panel level packaging further

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