Model Predictive Control

Model Predictive Control (MPC) is an advanced control strategy that uses a mathematical model of the system to predict future behavior — and solves an optimization problem at each time step to determine the optimal control inputs over a finite prediction horizon, subject to constraints.

What Is MPC?

- Principle: At each time step:
1. Predict system behavior over a horizon of N steps using the model.
2. Solve an optimization problem to minimize a cost function (tracking error + control effort).
3. Apply only the first control input.
4. Repeat at the next time step (receding horizon).
- Constraints: Naturally handles input/output constraints (actuator limits, safety bounds).

Why It Matters

  • Semiconductor Manufacturing: MPC is used for run-to-run (R2R) process control in etch, CMP, and CVD.
  • Optimal: Finds the best control action considering future consequences, not just current error.
  • Constraint Handling: The only mainstream control method that explicitly handles constraints in the optimization.

MPC is the chess-playing controller — looking several moves ahead and choosing the optimal action at each step while respecting the rules of the game.

Take model predictive control further

Ask the copilot about this term, or have our engineers assess it against your process.