Target Value

Target Value in SPC is the ideal, optimal value for a measured parameter — the nominal design value around which specifications are set, representing the center of the specification range where the product performs best or the process is most robust.

Target Value Context

  • Design Nominal: The intended value from the design — e.g., 28nm target CD for a 28nm gate.
  • Best Performance: The value that optimizes device performance — may differ from the spec center.
  • Process Center: Ideally, the process mean equals the target value — perfectly centered process.
  • Offset: Sometimes the target is intentionally offset from the spec center to account for downstream processing.

Why It Matters

  • Taguchi: The Taguchi loss function says quality loss increases as the parameter deviates from target — even within spec.
  • Centering: Centering the process on target maximizes process capability (Cpk approaches Cp).
  • APC: Advanced Process Control (APC) systems target the nominal value — run-to-run controllers adjust recipes to maintain on-target.

Target Value is the bullseye — the optimal nominal value that represents perfect process centering and best product performance.

Take target value further

Ask the copilot about this term, or have our engineers assess it against your process.