11 technical terms and definitions
XPS surface characterization thin films, chemical state oxidation XPS analysis, depth profiling sputtering XPS, semiconductor interface XPS metrology
X-ray Photoelectron Spectroscopy (XPS): Surface Characterization and Thin Film Analysis in Semiconductor Processing Introduction X-ray photoelectron spectroscopy (XPS), also known…
x-ray reflectivity, xrr measurement, thin film xrr, x-ray reflectometry semiconductor
X-ray reflectometry turns a grazing beam and a rapidly fading interference pattern into a depth model of a thin-film stack. The measurement is nondestructive and chemically…
ray, metrology, XRD, SAXS, semiconductor, analysis
Spectroscopic ellipsometry and inline optical wafer metrology constitute the non-destructive physical measurement and defect detection disciplines that govern yield control across…
xas, x-ray absorption fine structure, xafs, xas semiconductor, x-ray absorption metrology
X-ray absorption spectroscopy follows one selected element as incident X-ray energy is swept through a core-electron binding energy. The abrupt absorption edge and fine structure…
XRF mapping, micro-XRF mapping, x-ray fluorescence imaging, elemental mapping XRF, wafer XRF mapping, quantitative XRF microscopy
X-ray fluorescence mapping builds a spatially resolved elemental picture by rastering a focused or collimated excitation beam across a specimen and recording an energy spectrum…
xpeem, photoemission electron microscopy, x-ray peem, xpeem semiconductor, chemical imaging peem, magnetic domain xpeem
X-ray photoemission electron microscopy turns a surface-sensitive electron-yield measurement into a full-field image. Tunable X-rays illuminate a field of view, a cathode lens…
CDSAXS, XRR reflectometry, GISAXS grazing incidence, synchrotron lab source, buried structure measurement, sub nanometer sensitivity, model robust metrology
X-ray scatterometry uses X-ray diffraction and scattering, rather than visible or near-visible light, to measure nanoscale semiconductor structure dimensions — and the entire…
x-ray absorption near-edge structure, xanes spectroscopy, xanes oxidation state, xanes semiconductor, xanes metrology
X-ray absorption near-edge structure is the strongly featured portion of an absorption spectrum around an element-specific core edge. A few tens of electronvolts can carry…
xrd wafer stress, xrd crystal quality, rocking curve analysis, semiconductor xrd
Spectroscopic ellipsometry and inline optical wafer metrology constitute the non-destructive physical measurement and defect detection disciplines that govern yield control across…
metrology improving x-ray fluorescence (xrf) accuracy for composition analysis, metrology improving x-ray, improving x-ray fluorescence, x-ray fluorescence (xrf), metrology improving
Metrology: Improving X-ray fluorescence (XRF) accuracy for composition analysis Introduction & Motivation Metrology: Improving X-ray fluorescence (XRF) accuracy for composition…
xrf, x-ray fluorescence, xrf metrology, xrf thin film composition, xrf film thickness
X-ray fluorescence converts the discrete energies and intensities of emitted characteristic X-rays into an elemental account of a film, coating, wafer, or bulk material.…